The influence of methane on the boron incorporation in B-doped nanocrystalline diamond films

Janssens, S.D.S.D.JanssensPobedinskas, P.P.PobedinskasMortet, VincentVincentMortetHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15534The influence of methane on the boron incorporation in B-doped nanocrystalline diamond filmsOral presentation