Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

Selvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan Thourhout2021-10-192021-10-192011-010030-4018https://imec-publications.be/handle/20.500.12860/19760Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvementJournal article