Electrical resistivity and contact resistance in carbon nanotube vertical interconnects

Chiodarelli, NicoloNicoloChiodarelliLi, YunlongYunlongLiArstila, KaiKaiArstilaRichard, OlivierOlivierRichardCott, DaireDaireCottHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16862Electrical resistivity and contact resistance in carbon nanotube vertical interconnectsMeeting abstract