Eneman, GeertGeertEnemanYamaguchi, ShinpeiShinpeiYamaguchiOrtolland, C.C.OrtollandTakeoka, ShinjiShinjiTakeokaKobayashi, M.M.KobayashiWitters, LiesbethLiesbethWittersHikavyy, AndriyAndriyHikavyyMitard, JeromeJeromeMitardLoo, RogerRogerLooHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-192021-10-1920110018-9383https://imec-publications.be/handle/20.500.12860/18888Layout scaling of Si1-xGex pFETsJournal article