Milenin, AlexeyAlexeyMileninYudistira, DiditDiditYudistiraDe Koninck, YannickYannickDe KoninckBaryshnikova, MarinaMarinaBaryshnikovaKunert, BernardetteBernardetteKunertVerheyen, PeterPeterVerheyenVan Campenhout, JorisJorisVan CampenhoutPantouvaki, MariannaMariannaPantouvakiChan, BTBTChan2024-01-162022-09-262024-01-162022-09-20do not knowhttps://imec-publications.be/handle/20.500.12860/40515Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on SiMeeting abstractMaterials scienceDry Etching of III-V Layers, Monolithic Optical Device Fabrication on Si