Resolving the 3D boron distribution in vertical Si nanowires using atom probe tomography

Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannArnoldi, LaurentLaurentArnoldiVeloso, AnabelaAnabelaVelosoBogdanowicz, JanuszJanuszBogdanowiczMorris, RichardRichardMorrisVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28958Resolving the 3D boron distribution in vertical Si nanowires using atom probe tomographyMeeting abstracthttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf