Clarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstCollart, E. J. H.E. J. H.CollartMurrell, A. J.A. J.Murrell2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4202Electrical characterization of ultrashallow dopant profilesJournal article