Gronheid, RoelRoelGronheidVan Roey, FriedaFriedaVan RoeyGoethals, MiekeMiekeGoethalsSolak, Harun H.Harun H.SolakEkinci, YasinYasinEkincivan Ingen Schenau, KoenKoenvan Ingen SchenauVannuffel, CyrilCyrilVannuffelJouve, AmandineAmandineJouve2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10530Microstepper vs. interference EUV lithography: effects on resist profilesProceedings paper