Ivanov, TsvetanTsvetanIvanovPourghaderi, Mohammad AliMohammad AliPourghaderiLin, DennisDennisLinYu, Jen-KanJen-KanYuTan, S.S.TanMikhaylich, K.K.MikhaylichKimura, Y.Y.KimuraHellin, DavidDavidHellinGeypen, JefJefGeypenBender, HugoHugoBenderVertommen, JohanJohanVertommenKamarthy, G.G.KamarthyCollaert, NadineNadineCollaertMarks, J.J.MarksVahedi, VVVahediArghavani, R.R.ArghavaniThean, AaronAaronThean2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23196The influence of post-etch InGaAs Fin profile on electrical performanceProceedings paper