Carbon nanotube-carbon nanotube contacts as an alternative towards low resistance horizontal interconnects

Santini, ClaudiaClaudiaSantiniVolodin, AlexanderAlexanderVolodinVan Haesendonck, ChrisChrisVan HaesendonckDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-192021-10-1920110008-6223https://imec-publications.be/handle/20.500.12860/19729Carbon nanotube-carbon nanotube contacts as an alternative towards low resistance horizontal interconnectsJournal articlehttp://kkccyu.cjb.net/science/article/pii/S0008622311004040