Fakhimi, ParastouParastouFakhimiPorret, ClémentClémentPorretLoo, RogerRogerLooBerger, PaulPaulBerger2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28322Evaluation of different Ge epitaxial growth schemes for Ge VS with reduced TDDOral presentation