10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection

Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozDe Moor, PietPietDe MoorJohn, JoachimJoachimJohnMinoglou, KikiKikiMinoglouSrivastava, PuneetPuneetSrivastavaCreten, YbeYbeCretenTorfs, TomTomTorfsPutzeys, JanJanPutzeysSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetGiordanengo, BorisBorisGiordanengoBenMoussa, AliAliBenMoussaHochedez, Jean FrancoisJean FrancoisHochedezMertens, RobertRobertMertensVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-182010-12https://imec-publications.be/handle/20.500.12860/1755910 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detectionProceedings paper