Surface-confined activation of ultra low-k dielectrics in CO2 plasma

Sun, YitingYitingSunKrishtab, MikhailMikhailKrishtabMankelevich, YuriYuriMankelevichZhang, LipingLipingZhangDe Feyter, StevenStevenDe FeyterBaklanov, MikhaïlMikhaïlBaklanovArmini, SilviaSilviaArmini2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/27367Surface-confined activation of ultra low-k dielectrics in CO2 plasmaJournal articlehttp://scitation.aip.org/content/aip/journal/apl/108/26/10.1063/1.4955021