Kunnen, EddyEddyKunnenSeveri, SimoneSimoneSeveriVerheyen, PeterPeterVerheyenDupont, TaniaTaniaDupontVan Hoof, RitaRitaVan HoofVleugels, FrankFrankVleugelsHeck, J.J.HeckBelov, N.N.BelovDecoutere, StefaanStefaanDecoutereBoullart, WernerWernerBoullart2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15632Silicon tip formation by isotropic SF6/HBr based dry etchingMeeting abstract