Integration aspects of strained Ge pFETs

Witters, LiesbethLiesbethWittersEneman, GeertGeertEnemanMitard, JeromeJeromeMitardVincent, BenjaminBenjaminVincentLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyMilenin, AlexeyAlexeyMileninMertens, SofieSofieMertensThean, AaronAaronTheanCollaert, NadineNadineCollaert2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23398Integration aspects of strained Ge pFETsProceedings paperhttp://ieeexplore.ieee.org/search/searchresult.jsp?newsearch=true&queryText=witters+ulis&.x=0&.y=0