Epitaxial Si lift-off technology: Current status and challenges

Sivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanDepauw, ValerieValerieDepauwVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-242021-10-2420178750-1473https://imec-publications.be/handle/20.500.12860/29452Epitaxial Si lift-off technology: Current status and challengesJournal article