Stork, H.H.StorkBohr, M.M.BohrDurcan, M.M.DurcanShang-Ti, ChiangChiangShang-TiFukuma, M.M.FukumaDeclerck, GilbertGilbertDeclerckTaur, YuanYuanTaur2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9642What will end CMOS scaling - money or physics?Oral presentation