Haspeslagh, LucLucHaspeslaghDe Coster, JeroenJeroenDe CosterVarela Pedreira, OlallaOlallaVarela PedreiraDe Wolf, IngridIngridDe WolfDu Bois, BertBertDu BoisVerbist, AgnesAgnesVerbistVan Hoof, RitaRitaVan HoofWillegems, MyriamMyriamWillegemsLocorotondo, SabrinaSabrinaLocorotondoBryce, GeorgeGeorgeBryceVaes, JanJanVaesvan Drieenhuizen, BertBertvan DrieenhuizenWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13843Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applicationsProceedings paper