In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

Nguyen, DuyDuyNguyenLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVan Daele, BennyBennyVan DaeleRyan, PaulPaulRyanWormington, PaulPaulWormingtonHopkins, JohnJohnHopkins2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12614In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffractionOral presentationhttp://www.murota.riec.tohoku.ac.jp/SiGeC2007/