EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers

Roy, SyamashreeSyamashreeRoyCaron, ElkeElkeCaronSantos, AndreiaAndreiaSantosFranke, Joern-HolgerJoern-HolgerFrankeVandereyken, JelleJelleVandereykenHalder, SandipSandipHalder2024-02-052024-01-132024-02-052023978-1-5106-6748-80277-786XWOS:001125089900024https://imec-publications.be/handle/20.500.12860/43408EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layersProceedings paper10.1117/12.2687558978-1-5106-6749-5WOS:001125089900024