Patterning of Ag using a RIE process

Vicca, PeterPeterViccaSmout, SteveSteveSmoutSteudel, SoerenSoerenSteudelGenoe, JanJanGenoeSchutze, FalkFalkSchutzeFehse, KarstenKarstenFehseHeremans, PaulPaulHeremans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20087Patterning of Ag using a RIE processOral presentation