Modification of the effective minority carrier lifetime of silicon substrates by heat treatment and/or hydrogenation

Ulyashin, A.G.A.G.UlyashinScherff, M.M.ScherffJob, R.R.JobFahrner, W.R.W.R.FahrnerBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansAbrosimov, N.N.AbrosimovRiemann, H.H.Riemann2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8239Modification of the effective minority carrier lifetime of silicon substrates by heat treatment and/or hydrogenationOral presentation