Microscopic oxide defects causing BTI, RTN, and SILC on high-K FinFETs

Rzepa, GerhardGerhardRzepaWaltl, MichaelMichaelWaltlGoes, WolfgangWolfgangGoesKaczer, BenBenKaczerGrasser, TiborTiborGrasser2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25849Microscopic oxide defects causing BTI, RTN, and SILC on high-K FinFETsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7292279