Pedrine, AntonioAntonioPedrineDe Poorter, JohnJohnDe PoorterDe Schepper, LucLucDe SchepperBaert, KrisKrisBaert2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/816Low temperature wafer bonding on silicon nitrideProceedings paper