Lindsay, RichardRichardLindsayLauwers, AnneAnneLauwersFruehauf, JensJensFruehaufde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5448Effect of implant oxide on ultra-shallow junction formationProceedings paper