Characterization of InP growth in nm-sized trenches by a combination of NC-AFM and STM

Mannarino, ManuelManuelMannarinoEyben, PierrePierreEybenChintala, Ravi ChandraRavi ChandraChintalaMerckling, ClementClementMercklingvan Dorp, DennisDennisvan DorpVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24197Characterization of InP growth in nm-sized trenches by a combination of NC-AFM and STMMeeting abstract