Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)

Jacobs, Kristof J.P.Kristof J.P.JacobsDe Vos, JoeriJoeriDe VosStucchi, MicheleMicheleStucchiDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30945Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)Proceedings paperhttp://www-nanots.ist.osaka-u.ac.jp/en/?plugin=attach&refer=%E3%83%80%E3%82%A6%E3%83%B3%E3%83%AD%E3%83%BC%E3%83%89&openfile=NANOTS2018-programE.pdf