Advanced semiconductor devices for future CMOS technologies

Claeys, CorCorClaeysChiappe, DanieleDanieleChiappeCollaert, NadineNadineCollaertMitard, JeromeJeromeMitardRadu, IulianaIulianaRaduRooyackers, RitaRitaRooyackersSimoen, EddyEddySimoenVandooren, AnneAnneVandoorenVeloso, AnabelaAnabelaVelosoWaldron, NiamhNiamhWaldronWitters, LiesbethLiesbethWittersThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25084Advanced semiconductor devices for future CMOS technologiesProceedings paperhttp://ecst.ecsdl.org/content/66/5/49.abstractrogram/Paper50087.html