Dumon, PieterPieterDumonBogaerts, WimWimBogaertsTchelnokov, A.A.TchelnokovFedeli, J.J.FedeliBaets, RoelRoelBaets2021-10-172021-10-172008-041363-5182https://imec-publications.be/handle/20.500.12860/13683Silicon nanophotonicsJournal article