Plachetka, U.U.PlachetkaKristensen, A.A.KristensenScheerlinck, StijnStijnScheerlinckHuskens, J.J.HuskensKoo, N.N.KooKurz, H.H.Kurz2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14319Fabrication of photonic components by nanoimprint technology within ePIXnetJournal article