Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursor

Rodriguez, LeonardLeonardRodriguezFranquet, AlexisAlexisFranquetBrijs, BertBertBrijsTielens, HildeHildeTielensAdelmann, ChristophChristophAdelmann2021-10-202021-10-2020120734-2101https://imec-publications.be/handle/20.500.12860/21415Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursorJournal article