Low weight spreading resistance profiling of ultrashallow dopant profiles

De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2516Low weight spreading resistance profiling of ultrashallow dopant profilesJournal article