Assessment methodology of the lateral migration component in data retention of 3D SONOS memories

Liu, LifangLifangLiuArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschLiyang, PanPanLiyangVan Houdt, JanJanVan Houdt2021-10-222021-10-2220140026-2714https://imec-publications.be/handle/20.500.12860/24151Assessment methodology of the lateral migration component in data retention of 3D SONOS memoriesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271414002662