Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP

Sinapi, FabriceFabriceSinapiHeylen, NancyNancyHeylenTravaly, YoussefYoussefTravalyVereecke, GuyGuyVereeckeBaklanov, MikhaïlMikhaïlBaklanovKesters, ElsElsKestersVan Hoeymissen, JanJanVan HoeymissenHernandez, Jose LuisJose LuisHernandezBeyer, GeraldGeraldBeyerFisher, P.P.Fisher2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12912Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMPJournal article