Kuwahara, YuheiYuheiKuwaharaKawakami, ShinichiroShinichiroKawakamiKubota, MinoruMinoruKubotaMatsunaga, KoichiKoichiMatsunagaNafus, KathleenKathleenNafusFoubert, PhilippePhilippeFoubertMao, MingMingMao2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26863EUV process establishment through litho and etch for N7 nodeProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505775