Characterization and implementation of thermal ALD Al2O3 as surface passivation for industrial Si solar cells

Vermang, BartBartVermangLoozen, XavierXavierLoozenAllebe, ChristopheChristopheAllebeJohn, JoachimJoachimJohnVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16485Characterization and implementation of thermal ALD Al2O3 as surface passivation for industrial Si solar cellsProceedings paper