Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materials

Urbanowicz, AdamAdamUrbanowiczVanstreels, KrisKrisVanstreelsShamiryan, DenisDenisShamiryanDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820091099-0062https://imec-publications.be/handle/20.500.12860/16337Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materialsJournal article