Jourdan, NicolasNicolasJourdanRoze, FabienFabienRozeTabata, ToshiyukiToshiyukiTabataLariviere, StephaneStephaneLariviereContino, AntoninoAntoninoContinoMazzamuto, FulvioFulvioMazzamutoTokei, ZsoltZsoltTokei2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35348UV nanosecond laser annealing for Ru interconnectsProceedings paperhttps://conf.papercept.net/conferences/conferences/IITC20/program/IITC20_ContentListWeb_4.html