Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

Pathangi Sriraman, HariHariPathangi SriramanGronheid, RoelRoelGronheidVan Den Heuvel, DieterDieterVan Den HeuvelRincon Delgadillo, PaulinaPaulinaRincon DelgadilloChan, BTBTChanVan Look, LieveLieveVan LookBayana, HareenHareenBayanaCao, YiYiCaoHer, YoungJunYoungJunHerLin, GuanyangGuanyangLinParnell, DoniDoniParnellNafus, KathleenKathleenNafusSomervell, MarkMarkSomervellHarukawa, RyotoRyotoHarukawaChikashi, ItoItoChikashiNagaswami, VenkatVenkatNagaswamiD'Urzo, LuciaLuciaD'UrzoNealey, PaulPaulNealey2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24368Defect capture sensitivity in 14 nm half-pitch line/space DSA patternsMeeting abstracthttp://www.epapers.org/mne2014/ESR/paper_details.php?PHPSESSID=gbstlqptpeob4ctmsr39kdm5q7&paper_id=8606