Design-based metrology: beyond CD/EPE metrics to evaluate printability performance

Halder, SandipSandipHalderMailfert, JulienJulienMailfertLeray, PhilippePhilippeLerayRio, DavidDavidRioPeng, Hsin-YingHsin-YingPengLaenens, BartBartLaenens2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26688Design-based metrology: beyond CD/EPE metrics to evaluate printability performanceProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2508138