Duval, FabriceFabriceDuvalSoussan, PhilippePhilippeSoussanDetalle, MikaelMikaelDetalleBeyne, EricEricBeyne2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20635Chip embedding by spin-on-dielectricsProceedings paper