Modelling, simulation and experiment of both uniform and stepped thickness cMUT cells

Mao, ShengpingShengpingMaoRochus, VeroniqueVeroniqueRochusNauwelaers, BartBartNauwelaersBrondani Torri, GuilhermeGuilhermeBrondani TorriTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26957Modelling, simulation and experiment of both uniform and stepped thickness cMUT cellsOral presentation