Delabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxMaes, JanJanMaesBajolet, PhilippePhilippeBajoletBrijs, BertBertBrijsCartier, EduardEduardCartierConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstZhao, ChaoChaoZhaoGreen, MartinMartinGreenTsai, WilmanWilmanTsaiHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7488ALD HfO2 surface preparation studyProceedings paper