On the impact of mechanical stress on gate oxide trapping

Goes, W.W.GoesGrasser, T.T.GrasserKruv, AnastasiiaAnastasiiaKruvKaczer, BenBenKaczerGrill, AlexanderAlexanderGrillGonzalez, MarioMarioGonzalezFranco, JacopoJacopoFrancoLinten, DimitriDimitriLintenDe Wolf, IngridIngridDe Wolf2021-11-222021-11-022021-11-2220201541-7026WOS:000612717200161https://imec-publications.be/handle/20.500.12860/38217On the impact of mechanical stress on gate oxide trappingProceedings paper978-1-7281-3199-3WOS:000612717200161CIRCUIT