Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications

Chan, BTBTChanSingh, ArjunArjunSinghLuong, VinhVinhLuongParnell, DoniDoniParnellYamashita, FumikoFumikoYamashitaGronheid, RoelRoelGronheidde Marneffe, Jean-FrancoisJean-Francoisde MarneffePiumi, DanieleDanielePiumi2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26417Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applicationsProceedings paper