Evaluation of barrier integrity on ultra low-k films with different porosities

Wang, CongCongWangVan Besien, ElsElsVan BesienBaklanov, MikhaïlMikhaïlBaklanovVerdonck, PatrickPatrickVerdonck2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23373Evaluation of barrier integrity on ultra low-k films with different porositiesMeeting abstract