Okudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsHangen, UdeUdeHangenQui, AnqiAnqiQuiDe Wolf, IngridIngridDe Wolf2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27091Substrate independent mechanical properties of thin low dielectric constant materialsMeeting abstract