TVS measurements of metal ions in low-k dielectrics: effect of H2O uptake

Ciofi, IvanIvanCiofiTokei, ZsoltZsoltTokeiMangraviti, GiovanniGiovanniMangravitiBeyer, GeraldGeraldBeyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13527TVS measurements of metal ions in low-k dielectrics: effect of H2O uptakeProceedings paper