Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material

Kint, JeroenJeroenKintMattelaer, FelixFelixMattelaerVandenbroucke, SofieSofieVandenbrouckeMuriqi, ArbershaArbershaMuriqiMinjauw, MatthiasMatthiasMinjauwNisula, MikkoMikkoNisulaVereecken, PhilippePhilippeVereeckenNolan, MichaelMichaelNolanDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2021-10-282021-10-2820200897-4756https://imec-publications.be/handle/20.500.12860/35392Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid MaterialJournal article10.1021/acs.chemmater.9b05116