Mack, Chris A.Chris A.MackYannuzzi, JonathanJonathanYannuzziLorusso, GianGianLorussoZidan, MohamedMohamedZidanDe Simone, DaniloDaniloDe SimoneWeldeslassie, AtakltiAtakltiWeldeslassieVandenbroeck, NadiaNadiaVandenbroeckFoubert, PhilippePhilippeFoubertBeral, ChristopheChristopheBeralCharley, Anne-LaureAnne-LaureCharley2024-03-112024-01-092024-03-1120231932-5150WOS:001122013500014https://imec-publications.be/handle/20.500.12860/43369Probabilistic process window: a new approach to focus-exposure analysisJournal article10.1117/1.JMM.22.2.021007WOS:001122013500014